Dear MEMS group,
My question was not precise enough.
I have already found some values on the web and in the handbooks about Silicon,
however these values are mostly at very low temperature, less than 100 K. If
some people know what is the effect of doping on the thermal conductivity at
room temperature, is this a large effect from low resistivity 1 mohm*cm to high
resistivity 10000 ohms*cm ? At the end, I would like to have a silicon wafer
with the lowest thermal conductivity as possible and I am wondering if a highly
doped Si wafer would really make a big difference.
Thanks for your help
Danick
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-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of BRIAND Danick
Sent: Wednesday, May 14, 2003 9:24 AM
To: General MEMS discussion
Subject: [mems-talk] thermal conductivity Si high and low Resistivity
Hello,
does someone have an idea on the thermal conductivity of highly resistive
silicon, 3000-10000 ohms*cm ? Highly doped ? I would like to know the
extreme values of the silicon thermal conductivity as a function of doping
concentration.
with my best regards
Danick Briand
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