Dr. Kevin Walsh wrote:
Can anyone give me a suggestion on where I can get a PECVD nitride done
on some 4" device wafers which have patterned aluminum.  The nitride is
to be used as a protective layer during an extended KOH etch.
A couple of suggestions:

1) I'm in the middle of having some PECVD nitride dep'd on similar material,
through the NSF Natl Nanofab Users' Network, which in this case is being done
at the Center for Integrated Systems at Stanford. Contact Dr. John Shott
[email protected] for information on applying to use this facility.

2) For more general info, check the Semiconductor Subway WWW site through MIT,
and check the various facility capabilities documented there.

Al Henning