Abhiram:

A good starter reference that covers the basics of Langmuir probe theory and
operation, that I have found to be useful is the following:

"Electric Probes for Low Temperature Plasmas" by David N. Ruzic

Simple circuits for getting started are provided in the text along with the
relevant equations for extracting the information you are seeking from the
current-voltage data provided by the probe (e.g., plasma density, electron
temperature, etc.)

This text was distributed through the AVS (American Vacuum Society)
Monograph Series and was published by the The Education Committee of the
AVS.  ISBN is 1-56396-420-1.

Regards,
Robert Ditizio, Ph.D.
Tegal Corporation



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Message: 4
Date: Tue, 13 May 2003 18:38:11 -0400 (EDT)
From: Lakshmi Abhiram 
Subject: [mems-talk] information on langmuir probe:abhiram
To: [email protected]
Message-ID:
        
Content-Type: TEXT/PLAIN; charset=US-ASCII

hi all,could one of you let me know where to get the right information on
langmuir probe and its usage in dc sputtering.
this is what i am looking for...
1.the basic concept of lanmuir probe and how exactly does that work when
placed in a dc spuutering chamber.
2.the circuitry that is necessary to build the probe.

could one of you suggest me any books that cover the above mentioned
points.

thats all for now.

regards
abhiram.



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