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MEMSnet Home: MEMS-Talk: Etching SiO2 without affecting Aluminum
Etching SiO2 without affecting Aluminum
2003-05-15
bobo
2003-05-15
Tobias Kramer
2003-05-15
beaton@npphotonics (Bill Eaton)
2003-05-15
Kirt & Erika Zipf-Williams
2003-05-15
Mark McNie
2003-05-16
Neal Ricks
2003-05-15
Pavel Neuzil
2003-05-15
Dave Kharas
2003-05-16
[email protected]
2003-05-16
David Springer
Etching SiO2 without affecting Aluminum
bobo
2003-05-15
Dear all,
does anyone knows what wet etchant can etching silicon dioxide without etching
aluminum at the same time?   Thanks.
reply
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