Use Pad Etch 4 from Ashland.
It is formulated to etch through oxide and barely etch underlying aluminum.

    --Kirt Williams, Ph.D.    consultant

----- Original Message -----
From: bobo 
To: 
Sent: Wednesday, May 14, 2003 9:30 PM
Subject: [mems-talk] Etching SiO2 without affecting Aluminum


> Dear all,
> does anyone knows what wet etchant can etching silicon dioxide without
etching aluminum at the same time?   Thanks.
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