Seeking service: DRIE of quartz or pyrex
I am seeking a company or fab that can do deep etching (~ 15 um)
with vertical sidewalls into quartz or pyrex with a minimum feature size of
6 um.
These will be small wafer batches (~ 10 wafers/batch), as they are for
prototype devices. Any information would be useful. As I will be
attending several conferences over the next two weeks, the best method of
contact is email.
Thank you, in advance, for your time and information.
Antimony L. Gerhardt
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Antimony L. Gerhardt
Research Assistant
Microsystems Technologies Laboratories
Massachusetts Institute of Technology
60 Vassar Street, Building 39-511
Cambridge, Massachusetts 02139-4307
Phone 617.253.0446
Fax 617.253.5228
Email [email protected]
http://www-mtl.mit.edu
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