What happens if you don't use the O2?

Brent

Seh-Won Ahn wrote:

> Hello everyone,
>
> Does anybody have an experience with Aluminium etching for several hundred nm-
pitch gratings?
> I am using BCl3, Cl2, O2 gases for the etching.  But, PR damage is severe.
> Could you tell me proper etch mask, gas ratios, rf power, etc?
> Thank you in advance.
>
> Sincerely,
> Seh-Won Ahn
>
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