Etching SiO with BOE is straightforward.  BOE vendors have data sheets
describing the etch rate versus temperature.

The important thing about using BOE is safety.  Human exposure is very bad.
Suitable personal protection, fume hoods, and  face masks should be used.
There are also ointments that can be used to treat BOE burns, which should
be on hand before you use the stuff.

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA

-----Original Message-----
From: [email protected] [mailto:[email protected]]On
Behalf Of Zhang
Sent: Tuesday, May 20, 2003 3:44 AM
To: General MEMS discussion
Subject: [mems-talk] about BOE


hi:

Who know how to use BOE etch 3000A glass.
thank you

Zhang
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