[help] selective Ni etchant which does not attack Cu
Yoon Seung Wook
2003-05-21
I'm looking for the selective Ni etchant which does not attack Cu.
I tried with HNO3. It works with more than 100um dimension.
But now I have to work with 50um dimension. So undercutting is too
severe.
After etching only 30um left. There was about 10um undercutting.
Actually Ni is NiV.
Thanks in advance.