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MEMSnet Home: MEMS-Talk: Titanium Etchant
rf mems simulation tool
2003-05-26
kaustubh bhate
2003-05-27
David Nemeth
Titanium Etchant
2003-05-27
krishna
2003-05-28
Rich Jones
Titanium Etchant
krishna
2003-05-27
Dear MEMS members,

I am looking for an Ti etchant that can etch Ti which
is 300A and should not attack Al underneath it.

Please suggest me.
Thanks
Kris

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