Hi Mahdu,
Try dilute HF (1: 40). On the wafers that I have, there are NiFe structures,
I etch 200 Angstrom of Titanium around these structures and the NiFe is not
affected by the etch (around 20 seconds)
Best of luck
Magali
--
Energy Processing for ICT
NMRC, Lee Maltings, Cork, Ireland
Tel: +353 (0)21 4 904279
Fax: +353 (0)21 4 270271
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of madhulika sathe
Sent: 23 May 2003 17:42
To: [email protected]
Subject: [mems-talk] Titanium etch
I am looking for an etch for Titanium that does not affect the following:
1:Nickel
2:Iron
Any help in this regard would be greatly appreciated.
Thanks in advance!
Madhu
LSU
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