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MEMSnet Home: MEMS-Talk: question regarding photolithography
question regarding photolithography
2003-05-27
sandhya sandhya
2003-05-28
Hong Wu
2003-05-28
Mighty Platypus
2003-05-28
Fariborz Nadi
2003-05-28
[email protected]
2003-05-28
Bill Moffat
question regarding photolithography
sandhya sandhya
2003-05-27
Hai all,
I am Sandhya,a research student In Boise State University. I have a question
regarding photolithography, I am getting striations and small bubbles in the
resist after spinning and i am using SPR 220.7 resist. Can someone please kindly
say me what might be causing it and what should i do for eliminating them.
Sincerely
Research student
Sandhya Reddy




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