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MEMSnet Home: MEMS-Talk: High resistivity 4" SOI wafers.
High resistivity 4" SOI wafers.
2003-05-28
Lior Shiv
High resistivity 4" SOI wafers.
Lior Shiv
2003-05-28
I need urgently 4", SOI wafers with high resistivity. Preferably n type
floating zone Si.
The resistivity should be in the range of 100-10,000 Ohm cm for both
device and handle sides.
Device thickness at list 5 microns.

I will appreciate any help.

Regards,

Lior Shiv.
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