Hi, all:
You may try Microsurfaces, Inc. They are working on mono-molecular-layer
coating. They provide the service and license the technology. Their contact
info:

Xiaoyang Zhu,
MicroSurfaces, Inc.
Phone: (763) 788-0255

Regards,

Ping Li
Manager of Process Lab
NP Photonics, Inc.
5706 Corsa Ave.
Westlake Village, CA 91362
818-991-7044 Ext. 218
818-991-7128 (Fax)
mailto://[email protected]
http://www.npphotonics.com

-----Original Message-----

From: Dave Kharas [mailto:[email protected]]
Sent: Friday, May 16, 2003 8:16 AM
To: [email protected]
Subject: [mems-talk] vapor phase anti-stiction coatings


Hi all,
I was wondering if people are aware of a good
vapor phase anti-stiction coating that can
be applied to previously released devices, at a
relatively low temperature around 100C.
I am aware of some work at Berkeley, applying
DDMS and FDTS from a water plasma.
Are there commercial systems available?
At one point I thought I saw a post from Yield
Engineering about a system used on the TI DMD.
Is this approach similar to HMDS wafer priming?
ADI patent info and perusal through a Gelest catalog
suggests that they applied a rather bulky looking
Siloxane prior to packaging. Has anyone else had
experience with this?

Thanks in advance for your feedback.

Regards,

Dave Kharas Ph.D.