Hai all,
Thanks for the help. but i tried all those and the recipe i am using is:
1)spinning at 500 rpm with ramp=500rpm/sec to spread out the resist to the edge.
2)then ramping the speed to 1500rpm  with ramp=500rpm/sec to obtain 12micron
thick resist.

Then i even tried cleaning the wafers using pirahna before spinning resist.
So can anyone suggest me what I can do more.
sincerely






Sandhya Reddy
Research assistant
Boise state university
Ph.No. 208-426-5639

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