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MEMSnet Home: MEMS-Talk: posting a message.
posting a message.
2003-06-06
Chad D. Hudson
posting a message.
Chad D. Hudson
2003-06-06
To Whom It May Concern:

I would like to post a message on the mems-talk discussion list.

My question concerns my need to etch PtSi on SiC wafers preferably using
a wet etch technique, and thus what chemicals to utilize as an etchant
and a mask.

Thank you,
Chad D. Hudson
ECE Dept. Virginia Tech
reply
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