Dear Benoit,

We, at Analog Devices in Belfast, would be happy to assist, we are a
manufacturer of SOI substrates.
One of our core products, the BCO substrate, is based on DRIE of SOI with
additional oxide processes to create dielectrically isolated features.
Please feel free to contact me for further discussions,

With regards,
Chris.


-----Original Message-----
From: Benoît GAULIER [mailto:[email protected]]
Sent: 06 June 2003 15:36
To: General MEMS discussion
Subject: [mems-talk] Oxidation after DRIE


Dear Colleagues,

Am searching for practical information / experience on thermal oxidation after
DRIE Bosch process. I'm using SOI wafers and i want to oxide the wafers after
the DRIE step Does anybody know if this process is possible? Any experiences,
information, recipes, etc would be greatly appreciated.

Best regards,

Benoît GAULIER.

=================================================
   Benoît GAULIER
   Ingénieur Filière Microtechnologie
   THALES AVIONICS
   NAVIGATION
   25, rue Jules Védrines 26027 Valence CEDEX
   Télécopie: (+33) (0) 4-75-79-86-06
   Bureau: (+33) (0) 4-75-79-88-25
=================================================



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