Good morning.

I am a graduate student majoring in MEMS.

Doing research, I am concerning about Selectivity between pylex glass and
silicon nitride in dry etching(release).

If you have any materials and information, let me know how i can approach.

Thank you for reading.

Have a nice day.

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** Changing your inner and outer world is easier than you might think. **
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Shim yu-seok
Kwangju Institute of Science and Techology
1 Oryong-dong, Buk-gu, Gwangju
500-712, Korea(South)

Tel:  +82-62-970-2424
Fax : +82-62-970-2384
e-mail : [email protected]