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MEMSnet Home: MEMS-Talk: Measure polysilicon grain size
Measure polysilicon grain size
2003-06-10
CHEW SOON AIK
TMAH Etchant
2003-06-11
krishna
Measure polysilicon grain size
CHEW SOON AIK
2003-06-10
Hi all,

I try to measure average grain size of polysilicon by using line-intercept
method. But I have difficulties to understand the equation that given. Can
any of you give me a brief explanation on how to calculate the average grain
size?

Thanks & regards,
Soon Aik

reply
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