I am mounting a wafer with large holes in it onto another wafer in order to
spin resist on it.  The wafer is delicate, so I'm mounting it with black
wax.  However, I find the resist solvent (I'm using AZ4210) attacks the
blackwax a little, leaving a residue on the wafer.

Clear wax (I forget which kind) which dissolves in acetone is worse - it
dissolves in the photoresist solvent, and creates large, unpatternable areas
when I spin it.

Because of the fragility of the wafer, I need something that melts so I can
slide the wafer off easiliy, so using photoresist itself as an adhesive
won't work.

Has anyone else encountered this problem?  Does anyone know of a mounting
wax that is not attacked by the photoresist solvent?

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576