Bing- you list in your subject as Silica on Silicon- but if you need the
Si02 that would be Silicon Dioxide coating.
If you need 10-20 microns- let me know and can help you out.

Regards.,
Ken

Bing Yu wrote:
> Hi, MEMS Friends,
>
> Does anybody happen to know a vender of SiO2-on-Si wafers with 10~30 micron
SiO2 on top?
>
> Thanks.
>
> Bing

Kmbh Associates
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High Purity Float Zone and Specialty CZ Silicon  for Power, IR and
Mirror Optics, Optoelectronics, MEMS, SOI, and other Semiconductor
applications. Service in SOI, Polishing SSP and DSP.