Hello David,

You can contact Tim Pyle at Aquabond Technologies.  They have a wax that
comes in stick form and also in sheets.  He can help answer your
questions regarding its resistance to the solvent.  I do know that this
wax does not leave a residue after removal.

[email protected]


If you have questions on dicing blades for your wafers or other
materials please let me know,

Mario Robles

Tanaka Systems, Inc.
2577 Leghorn Street
Mountain View, CA 94043

650-966-8001 ofc
650-966-1881 fax
www.dicingblades.com
Dicing Blades * Backgring Wheels * CMP Pad Conditioners


-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of David Nemeth
Sent: Tuesday, June 10, 2003 8:33 AM
To: [email protected]
Subject: [mems-talk] Wafer mounting

I am mounting a wafer with large holes in it onto another wafer in order
to
spin resist on it.  The wafer is delicate, so I'm mounting it with black
wax.  However, I find the resist solvent (I'm using AZ4210) attacks the
blackwax a little, leaving a residue on the wafer.

Clear wax (I forget which kind) which dissolves in acetone is worse - it
dissolves in the photoresist solvent, and creates large, unpatternable
areas
when I spin it.

Because of the fragility of the wafer, I need something that melts so I
can
slide the wafer off easiliy, so using photoresist itself as an adhesive
won't work.

Has anyone else encountered this problem?  Does anyone know of a
mounting
wax that is not attacked by the photoresist solvent?

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576


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