Hi Shreyash,
I am not sure if your sample is compatible with this method but I have
used a UV Ozone system to remove SAM coatings. Since the system is mainly
line of sight so it will leave the bottom SAM coating intact. However, make
sure you don't place the sample in the system too long because the system
can slowly etch the SAM on the underside portion of your cantilever.
Phil Tabada
>From: Shreyash Gupta _01007019_
>Reply-To: General MEMS discussion
>To: General MEMS discussion
>Subject: [mems-talk] Selective coating of BSA
>Date: Mon, 9 Jun 2003 21:19:37 +0530 (IST)
>
>Dear all,
> Can someone tell me how do we selectively coat the lower surface of a
>cantilever with BSA and not the upper one.
>And is their any metal to which DSU does not bond??
>
>Thanx a lot
>shreyash
>
>
>
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