Hi
You can use white wax from aremco corp.
It melts at about 60 DegC and is soluble in water but
not in acetone.
http://www.aremco.com/p_index.html

greetings
Stefan Blunier

-----Original Message-----
From: David Nemeth [mailto:[email protected]]
Sent: Dienstag, 10. Juni 2003 17:33
To: [email protected]
Subject: [mems-talk] Wafer mounting


I am mounting a wafer with large holes in it onto another wafer in order
to spin resist on it.  The wafer is delicate, so I'm mounting it with
black wax.  However, I find the resist solvent (I'm using AZ4210)
attacks the blackwax a little, leaving a residue on the wafer.

Clear wax (I forget which kind) which dissolves in acetone is worse - it
dissolves in the photoresist solvent, and creates large, unpatternable
areas when I spin it.

Because of the fragility of the wafer, I need something that melts so I
can slide the wafer off easiliy, so using photoresist itself as an
adhesive won't work.

Has anyone else encountered this problem?  Does anyone know of a
mounting wax that is not attacked by the photoresist solvent?

David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576


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