Hi
You can find a lot of information in the book "Silicon Micromachining"
from M. Elwenspoik and H. Jansen
Chapter 11.

Greetings
Stefan Blunier

-----Original Message-----
From: Priyank Gupta [mailto:[email protected]]
Sent: Donnerstag, 12. Juni 2003 01:15
To: [email protected]
Subject: [mems-talk] RIE process parameters for Si Etching




hi!,
I have some problem with etching of silicon using RIE process. I'm
wodering if
anyone knows about the process parameter (about 1-2 micrometer), gas
used,
photresist, pressure, rf power etc. for etching of Si.

Thanks
Priyank Gupta
Research Assistant
ECEN
Oklahoma State University

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