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MEMSnet Home: MEMS-Talk: TiW etched in HF
TiW etched in HF
2003-06-18
[email protected]
TiW etched in HF
[email protected]
2003-06-18
Does anyone know approximately what is the etch rate of TiW in 49% HF?
Thanks!



Andrea Tombros

Research Engineer

Washington Technology Center Microfab

206-616-5725

[email protected]




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