Hi,
I recently read an oblique reference to a problem with gold
contamination of KOH and TMAH etchants used in anisotropic etching.
Does anyone have a idea what the problem is ?
Thanks,
Ken Westra
Ken Westra PhD
Staff Scientist
Alberta Microelectronic Centre
# 318 11315 87 Ave
Edmonton Alberta Canada
T6G 2T9
Phone: 403 492 5570 ext 234
Fax: 403 492 1643