Jensen, Brian D., S. Mutlu, S. Miller, K. Kurabayashi, J. J. Allen (in
print) "Shaped comb fingers for tailored electro-mechanical restoring
force" (http://www-personal.umich.edu/~bdjensen/index.htm)

Nguyen, C. T. C., R. T. Howe (1999) "An integrated CMOS micromechanical
resonator high-Q oscillator" IEEE J. Solid-State Circuits Vol 34 No. 4 pp.
440-455

Tang, William C., T. C. H. Nguyen, R. T. Howe (1989) "Laterally driven
polysilicon resonant microstructures" Tech. Dig. IEEE MEMS Workshop pp. 53-59

Ye, W., S. Mukherjee, N. C. MacDonald (1998) "Optimal shape design of an
electrostatic comb drive in microelectromechanical systems" J. MEMS Sys.
Vol. 7 No. 3 pp. 16-26


At 03:11 PM 15/06/03 +0800, you wrote:
>Hi,
>
>Could you recommend some papers related with the theory analysis of
>Vertical Comb Driver for our reference ASAP?
>
>Thank you very much.
>