Hello all,
I would like to know if there is a standard RIE recipe to etch Si3N4
selectively over Si and the etch rate of the process and the
selectivity.
Thanks in advance,
Srinivas Parimi
Research Assistant
Center for Microelectronic Sensors and MEMS (CMSM)
372 ERC
University of Cincinnati
Cincinnati OH 45221
(513) 556 4795
[email protected]
