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MEMSnet Home: MEMS-Talk: Sputtered films Vs Electroplated films
Sputtered films Vs Electroplated films
2003-06-23
Devarajan Balaraman
2003-06-23
[email protected]
Sputtered films Vs Electroplated films
Devarajan Balaraman
2003-06-23
Hello  folks,

Between sputtered films and electroplated films, which one is expected to
have lower residual stresses. In either case what are the best conditions
for obtaining stress free films?

Thank you.

Dev






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