Look on th CNF website
http://www.cnf.cornell.edu/cnfprocesses/cnf_process.htm
They have a recipe I've beem using for a parallel plate PECVD tool.

Jobert van Eisden

SUNY Albany

-----Original Message-----
From: Dlee Li
To: [email protected]
Sent: 6/20/2003 5:17 PM
Subject: [mems-talk] PECVD Si3N4 recipe

Hi,
anyone can give me his workable PECVD Si3N4 recipe? we need to add PECVD

Si3N4 to our system.

thanks
Dlee

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