Hi Srinivas

   You can go to websites of other universities to find out a typical recipe
for SI3N4.  You can try out Berkeley's Si3N4 etch using LAM Auto etcher.

argon.eecs.berkeley.edu

Phil Tabada



>From: "Srinivas Parimi" 
>Reply-To: General MEMS discussion 
>To: 
>Subject: [mems-talk] RIE of Si3N4
>Date: Sun, 22 Jun 2003 22:32:43 -0500
>
>Hello all,
>
>I would like to know if there is a standard RIE recipe to etch Si3N4
>selectively over Si and the etch rate of the process and the
>selectivity.
>
>
>Thanks in advance,
>
>Srinivas Parimi
>Research Assistant
>Center for Microelectronic Sensors and MEMS (CMSM)
>372 ERC
>University of Cincinnati
>Cincinnati OH 45221
>(513) 556 4795
>[email protected]
>
>
>
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