A recipe I've used for PECVD SiN on a Pacific Western Systems Coyote is:
330 sccm SiH4 (100%)
2000 sccm NH3
300 watts RF Power
pressure = 2 torr

Roger Shile

----- Original Message -----
From: "Dlee Li" 
To: 
Sent: Friday, June 20, 2003 2:17 PM
Subject: [mems-talk] PECVD Si3N4 recipe


> Hi,
> anyone can give me his workable PECVD Si3N4 recipe? we need to add PECVD
> Si3N4 to our system.
>
> thanks
> Dlee
>
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