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MEMSnet Home: MEMS-Talk: Sputtered films Vs Electroplated films
Sputtered films Vs Electroplated films
2003-06-23
Devarajan Balaraman
2003-06-23
[email protected]
Sputtered films Vs Electroplated films
[email protected]
2003-06-23
Both processes build residual stress on thin films. The quantum of stress
depends on thickness of the film deposited. Sputter process has high stress even
for low thickness films. Stress is less for plated films at low thickness. You
need to choose your process based on your application and thickness.
Best regards
Gautham, Absara Micro Systems

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