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MEMSnet Home: MEMS-Talk: Platinum electroplating
RIE of Si3N4
2003-06-23
Srinivas Parimi
2003-06-23
Phillipe Tabada
Platinum electroplating
2003-06-24
sokwon Paik
Platinum electroplating
sokwon Paik
2003-06-24
My name is sokwon Paik and I'm a Ph.D student of Texas
A&M University.
I want to electroplate platinum on my wafer on top of
gold.
Anybody knows the vendor and recipe for the platinum
electroplating?
Please let me know if you have any idea about this.

Thanks,


Sokwon Paik

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