Hi, Members,

I am trying to do the bonding between su8-50 and su8-2. First I fabricate the
channel with su8-50 and then spin su8-2 on another glass slide and soft bake
it, then put it on the other slide with channels on it. The problems I have
are:
1. How long to soft bake the su8-2 before bonding
2. When I put the slide with su8-2 on the channel slide, need I use some weight
to help the bonding.
3. Doing bonding we also need the hotplate, how much the temperature is good and
the time

Is there anyone can help me figure this out. Thank you very much!

Huinan
Huinan Liang
Department of Bioengineering
The Pennsylvania State University
205 Hallowell Building
University Park, PA 16802-6804
Phone:(814)865-6744