Transene Company offers a sulfite gold plating solution, TSG-250, with
better photoresist compatibility than cyanide solutions.  Information
may be found at www.transene.com.

Christopher Christuk
Transene Company

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Tuesday, June 24, 2003 4:03 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Photoresist for AU plating

I think ur gold bath is sightly alkaline, isn't it?
Alkaline will dissolve positive photoresists. I think you
might try negative photoresists instead since negative
photoresists doesn't dissovle in alkakine.

> Hi all,
>
> I was doing gold electroplating using cynide bath.I
> was doing plating on Si wafer sputtered with gold
> later covered with photoresist ,exposed and developed
> and hardbaked.
>
> after doing the above i have tried AU electroplating.I
> was  going for very low current densities and very low
> temperature and with optimum PH after very less time i
> could obsevere the plating of gold but the Photoresist
> is disturbed and the pattern was disturbed.
>
> Can i find any ways to improve adhesion of photoresist
> on AU surface.
>
> Ur suggestions are highly appreciated.
>
> Thanks
> Kris
>
>
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Best Regards,
Kin