Hi Sukanta

You can use (KOH with IPA) or TMAH to etch Silicon. The
methods can be found in Marc Madou's book Fundamentals of
fabrication

good luck

anupama

> Hi
>   Can anybody help me how to do chemical etching of
> silicon.what  chemicals and at what solutions it should be
> used. please help
>
> sukanta
>
> Optoelectronics division
> SAMEER
> IIT powai campus
> mumbai-76
>
>
> sukanta Debbarma
> Scientific officer
> SAMEER,IIT Mumbai-400076
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