You could give PiRL III from brewerscience.com a shot if it has to be
removed afterwards, or try any polyimide from HD microsystems.

-----Original Message-----
From: Greg Miller
To: General MEMS discussion
Sent: 6/24/2003 12:26 PM
Subject: [mems-talk] spin-on material


I'm looking for a spin-on non-UV curable material that I would be able
to spin-on at 40 microns thick would be resistant to Acetone, IPA, Gold
etch (KI, I2), Cr etch (CEP200), and temperature up to 200 C.

Currently, We are mounting dies onto another wafer with 42 microns of
SU-8 which forces us to use transparent wafers and also some unnessecary
steps. We would like to improve this process by spinning on something
comparable that only requires some heat.  Any suggestion would greatly
be appreciated.

Thanks,

Greg Miller
KVH Industries
8412 W 185th Street
Tinley Park, IL 60477
Email: [email protected]



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