hi
can you try KOH or TMAH?

regards
Michaela

>-----Ursprüngliche Nachricht-----
>Von: Sukanta [mailto:[email protected]]
>Gesendet: Donnerstag, 26. Juni 2003 08:38
>An: [email protected]
>Betreff: [mems-talk] help for silicon etching
>
>
>Hi
>  Can anybody help me how to do chemical etching of silicon.what
>chemicals and at what solutions it should be used.
>please help
>
>sukanta
>
>Optoelectronics division
>SAMEER
>IIT powai campus
>mumbai-76
>
>
>sukanta Debbarma
>Scientific officer
>SAMEER,IIT Mumbai-400076
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