Many announcements are now available by World Wide Web in addition to ftp. For
World Wide Web users, the URL is "http://mems.isi.edu/mems".

Short Course on Monolithic Surface-Micromachined Inertial Sensors:

When: 23-24 May 1995
Where: San Francisco Airport, Crown Sterling Suites Hotel, Burlingame, Ca.
Organizers: Profs. Bernhard E. Boser, Roger T. Howe, and Albert P. Pisano

Surface micromachining has enabled the integration of polysilicon
micromechanical structures with CMOS or Bipolar/MOS electronics. This
technology is already having a major impact in accelerometers for air-bag
deployment and has the potential for much higher performance accelerometers, as
well as vibratory rate gyroscopes. Successful design of these closed-loop
sensors requires a background in the microstructure and circuit technology, the
mechanical design of "laminar" suspensions and proof masses, and the system and
circuit approaches for sensing and controlling the position of the sense
element.

This two-day short course will supply the basic knowledge and the design
principles to understand the capabilities and limitations of surface
micromachined sensors for both accelerometers and for gyroscopes. During the
first day, participants will be introduced to the process, sense element, and
circuit fundamentals. The Analog Devices XL-50 monolithic accelerometer will be
discussed in detail as a motivating example. The second day will tackle the
design of high-performance inertial sensors and introduce several
domain-specific CAD tools. Fabrication constraints, packaging, sensor errors,
analog vs. digital closed-loop performance trade-offs, and system partitioning
are among the topics that will be addressed. A sigma-delta modular based
accelerometer will be used to focus the discussion. The course closes with an
open session for interaction with the lecturers.

For more information about this information please see:
    "/mems/Announcements/ucb_sensors_course.txt"

in the ISI MEMS Archive ("mems.isi.edu"). Or via WWW:
    http://kowloon.eecs.berkeley.edu/~boser/shortcourse.html
    http://mems.isi.edu/mems

       e-mail: [email protected]
       phone:  (510) 642-4151
       fax:    (510) 643-8683
       surface mail: Continuing Education in Engineering
                     University Extension
                     University of California
                     2223 Fulton Street
                     Berkeley, CA 94720-7010