Hi,

        I would like to know mass spectrometer is a good way for measuring
end point using CF4 and SF6 based chemistry in terms of cost, reliability,
and any lifetime issue as it is exposed in the plasma. Thanks in advance
for any feedback.

Yours sincerely,

Isaac Chan

Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
200 University Ave. W
Waterloo, Ontario, Canada
N2L 3G1
Tel: (519) 729-6409, ext. 6014
Fax: (519) 746-6321
[email protected]
http://www.ece.uwaterloo.ca/~a-sidic