Hello Huinan,

SUSS MicroTec is a manufacturer of substrate bonders which would be the
perfect tool for your application since it allows accurate control of
pressure and heat during the bond process. In the past, we already did quite
a number of SU-8 bonds with good success and we would be happy to share some
of our knowledge in a personal conversation with you. Please feel free to
contact either myself ([email protected]) or Maggie Zoberbier
([email protected]) of our European Applications Center. For a first
overview you may also visit our web site at http://www.suss.com

Frank.

--------------------------------------------
SUSS MicroTec
Applications Center Europe
Frank Runkel
Schleissheimer Str. 90
85748 Garching
Germany
Fon     +49 89 32007 - 302
Fax     +49 89 32007 - 390
email   [email protected]


> ------------------------------
>
> Message: 6
> Date: Tue, 24 Jun 2003 13:45:00 -0400 (EDT)
> From: "HUINAN LIANG" 
> Subject: [mems-talk] Su8 bonding problem
> To: [email protected]
> Message-ID: <[email protected]>
> Content-Type: text/plain
>
> Hi, Members,
>
> I am trying to do the bonding between su8-50 and su8-2. First I fabricate
> the
> channel with su8-50 and then spin su8-2 on another glass slide and soft
> bake
> it, then put it on the other slide with channels on it. The problems I
> have
> are:
> 1. How long to soft bake the su8-2 before bonding
> 2. When I put the slide with su8-2 on the channel slide, need I use some
> weight
> to help the bonding.
> 3. Doing bonding we also need the hotplate, how much the temperature is
> good and
> the time
>
> Is there anyone can help me figure this out. Thank you very much!
>
> Huinan
> Huinan Liang
> Department of Bioengineering
> The Pennsylvania State University
> 205 Hallowell Building
> University Park, PA 16802-6804
> Phone:(814)865-6744
>
>