You'll probably have to polish.

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Friday, June 27, 2003 12:06 AM
To: [email protected]
Subject: [mems-talk] LPCVD Polysilicon with optical quality
Importance: High


Hi,Everybody,

Now I want to deposit thick polysilicon as the the micromirror by LPCVD.But
we found that the roughness ofthe polysilicon surface is very serious.

Could you give me some advice or recipes to improve the surface roughness of
the polysilicon by LPCVD to make it more smooth for optical reflection
application?

Thank you very much.

Li DC
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