My friend Isaac,

You ask more questions than anyone else I know.
I use a simple HeNe and bounce the beam off my substrate to a photo detector
that is wired to a strip chart recorder.  It shows when I go through different
layers and when to stop.  Depending on what accuracy you need will determine
if you can use this cheap method.
Should I start writing your thesis yet?

Your friend,

Brent

Isaac Wing Tak Chan wrote:

> Hi,
>
>         I would like to know mass spectrometer is a good way for measuring
> end point using CF4 and SF6 based chemistry in terms of cost, reliability,
> and any lifetime issue as it is exposed in the plasma. Thanks in advance
> for any feedback.
>
> Yours sincerely,
>
> Isaac Chan
>
> Ph.D. Candidate
> Dept. Electrical & Computer Engineering
> University of Waterloo
> 200 University Ave. W
> Waterloo, Ontario, Canada
> N2L 3G1
> Tel: (519) 729-6409, ext. 6014
> Fax: (519) 746-6321
> [email protected]
> http://www.ece.uwaterloo.ca/~a-sidic
>
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