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MEMSnet Home: MEMS-Talk: LPCVD Polysilicon with optical quality
LPCVD Polysilicon with optical quality
2003-06-27
[email protected]
2003-06-28
mahdi bagheri
2003-06-27
Maurice Norcott
LPCVD Polysilicon with optical quality
mahdi bagheri
2003-06-28
dear,

if your substrate isn't smooth ,the deposited layer will be

rough.chek it.

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