Knut,
     The standard HMDS when applied in a vacuum vapor primer is an excellent
adhesion promoter on TiN.  After the total dehydration caused by vacuum hot
Nitrogen cycles the HMDS vapor is looking for Hydrogen.  The only hydrogen
available is the hydroxyl ions on the surface of the TiN.  The fact that a
metallic is involved will reduce the available number of hydroxyl ions so the
actual time of prime may need to increased to compensate.  It can be checked
easily using a goniometer to check surface tension.  Aim for more than 45
degrees contact angle.  Quick rule of thumb.  Where 5 minutes of prime are great
for SiN, 20 minutes is best for Aluminum.  The Ti will be somewhere in between.
Let me know if we can help some more.  Bill Moffat

-----Original Message-----
From: Knut Lian [mailto:[email protected]]
Sent: Monday, June 30, 2003 11:08 PM
To: MEMS (E-mail)
Subject: [mems-talk] Adhesion promotors for TiN


Dear MEMS collegues,

Does anybody know a suitable adhesion promotor for improving the adhesion of
Shipley 1800 series resist on TiN?

Best regards

Knut Lian
Process Development Engineer
SensoNor asa
www.sensonor.com



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