Dear Arkady

There are many papers about the MEMS development. You can find them in some IEEE
Journals and conferences proceedings, such as International Conference on Solid-
State Sensors and Actuators, IEEE Miro Electro Mechancial Systems Workshop,etal.
I'll offer you some papers' title as examples:

1.R.S.Payne, etal, "Surface Micromaching: From Vision to Reality to Vision",
1995 IEEE International Solid State Circuits Conference, pp.164.

2.K.D.Wise, "The Coming Opportunities in Microsensor Systems", Digiest Technical
Papers, 1991 International Conference on Solid-State Sensors and
Actuators(Transducers'91),1991, pp.2-7.

3.K.J.Gabriel, "Engineering Microscopic Machines", Scientific Amercian, Vol.260,
September 1995, pp.118-121.

Good luck

Ruan Aiwu