Thomas,

Try switching at least your soft bake to a hot-plate. Microchem wrote
all of its specs with hotplates in mind, so in an oven you may not be
baking of all of the solvent, or more likely given your symptoms, you
are baking off the top layer of solvent and trapping the rest in lower
layers which dissolve in the develop.

Since a hot plate heats from the bottom, this is less likely to happen.

Greg Reimann
Boston University

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of
Thomas KF Lei
Sent: Wednesday, July 02, 2003 8:16 AM
To: [email protected]
Subject: [mems-talk] SU-8 problem

Dear collegues,

I have some problems in doing MicroChem SU-8 2075 PR on Si. My process
is:
spin 500rpm and 3000rpm 30secs
soft bake: 95C 15mins in oven
UV explore with filter WB-360: 300secs
PEB: 95C 10mins in oven
Develop: about 10mins

I found that the surface of SU-8 becomes wrinkling after PEB and my
pattern peer off after develop. Can anyone give me some suggestions?
Thank you very much.

Thomas

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