DA Nanomaterials sells a CMP slurry for copper.  Don't know how you
would use it to pattern anything though.

Transene sells etchants for just about everything including copper.

You will need an adhesion layer especially if you are going to polish
it.  Ti is working better for me than chrome, but I am trying to get
them both to work.

Greg Reimann
Boston University

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of ÀÌÅ¿ø
Sent: Wednesday, July 02, 2003 11:01 AM
To: [email protected]
Subject: [mems-talk] Cu Metal Etchant

hi.

I heard about Cu could be patterned by something like CMP Process (
damascene(?) process)

Are there any wet etchants fot Cu etch? If not, what is the main reason
about that?

Furthermore, Adhesion layer (Ti or Cr) is not required when I deposit Cu
on Si Wafer ?

Thank you for in Advance.

TW Lee.

-----------------------------------------------------------
AeroMEMS Laboratory.
School of Mechanical & Aerospace Engineering.
Seoul National University , Seoul , KOREA.
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